Introduction
Getting started
Part 1: Mechanical Devices
1.1 Introduction to MEMS
1.2 Mechanical deformation
1.3 Strain gauges
1.4 Assignments
Challenge 1: Piezo resistive accelerometer
Part 2: Electrostatic Transducers I
2.1 Introduction
2.2 Electrostatic energy
2.3 Force and voltage
2.4 Intensive and extensive variables
2.5 Capacitor with spring
2.6 Voltage control and stability
2.7 Example: ADXL-50 accelerometer
2.8 Other configurations
2.9 Legendre transform
2.10 Small-signal behavior: characteristic equations
2.11 The coupling factor
2.12 Assignments
Challenge 2: Electrostatic switch
Part 3: Electrostatic Transducers II
3.1 Let's start with a quick test
3.2 Reflection on challenge 2, the electrostatic switch
3.3 Case: Power sensor
3.4 Assignments
Challenge 3: Seismometer
Part 4: Magnetic Transducers
4.1 Reflection on assignment 3, Seismometer
4.2 Examples of magnetic transducers
4.3 Energy in the magnetic domain
4.4 Four cases
4.4.1 Relay
4.4.2 Electrodynamic microphone
4.4.3 Loudspeaker
4.4.4 Voice coil actuator
Challenge 4: Micro Coriolis mass flow sensor
The exam
Open book exam
Example exams